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Read full testimonial »Crius Ii-l
AIXTRON SE >>
Description
The CRIUS® II-L reactor is based on the Close Coupled Showerhead® (CCS) concept, which as a key-enabling technology has a well proven track record in being easily scalable with a seamless and short process transfer. The new AIXTRON CRIUS® II-L, the world's largest capacity MOCVD reactor is now available with a 16x4 inch or 69x2 inch capacity. It offers unsurpassed throughput, combined with an outstanding yield due to its excellent uniformity and reproducibility. The reactor design is optimized for wafer sizes from 2 to 8 inch and offers the potential for even further productivity enhancements.
| Product line: | Optical Manufacturing and Design |
|---|---|
| Subcategories: | Chemical Vapor Deposition Equipment |
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