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CDX Series Dual Frequency Power Supplies

Cdx Series Dual Frequency Power Supplies

Comdel, Inc >>

Description

The CDX dual frequency RF generator comes in a 1200 or 2000 watt design. The high frequency (HF) section of the CDX provides 600 or 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 600 or 1000 watts, with optional fixed or variable frequencies ranging from 20 kHz to our new 13.56 MHz.

This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as solar cell and photovoltaic applications.

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