CB Series High Frequency Power Supplies from Comdel, Inc

Applications:
The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

Features:
• Standard power ranges: 50, 200, 300, 500, 600,
1000, 1250, 5000 Watts
• Standard fixed frequencies: 13.56 MHz,
27.12 MHz, 40.68 MHz, 60 MHz
• Patented S-Technology provides ultra-stable output.
This stabilizing technology optimizes amplifier
performance, reducing power-gain changes
caused by plasma impedance fluctuations.
• Designed to meet ETL and SEMI F47 directives
• Forward or Delivered power mode regulation