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Testimonials
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Read full testimonial »Cx Series High Frequency Power Supplies
Comdel, Inc >>
Description
Performance:
The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability.
Applications:
The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
CX High Power Supplies:
The CX series extends to high-power ranges of 5000 and 10,000 Watts.
Features:
• Patented S-Technology provides ultra-stable output.
This stabilizing technology optimizes amplifier
performance, reducing power-gain changes
caused by plasma impedance fluctuations.
• ETL Marked for product safety and SEMI F47
compliant
• Local control via encoder and softkey inputs
• Standard RS-232 and analog/digital control
• Active front panel with full controls and programmable
microprocessor
• Control circuitry ensures consistency during
high VSWR conditions
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