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VaporGen i2000

Vaporgen I2000

iCon Dynamics, LLC >>

Description

The VaporGen i2000 is a fully automated precursor vapor delivery system designed for VAD and OVD Preform manufacturing processes.  Featuring two of iCon';s patented SMR vapor generators for SiCl4 and GeCl4, VaporGen is capable of supporting multiple points of use. with flow capacity up to 200 grams per SMR.  Profibus network communications enable for remote control and monitoring of system performance.  Local control with color touch screen navigation, provides easy maintenance, and system setup conditions.

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