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Vacuum Equipment Components and Accessories

Optical Manufacturing and Design | Vacuum Equipment Components and Accessories

Oracle: Loadlocked RIE/PECVD with Vacuum Cassette Elevator

The Oracle III is the smallest and most flexible full production cluster system on the market. The system consists of a central vacuum transport (CVT), vacuum cassette elevators and up to four process reactors. These process reactors are docked to th...

Trion Technology
Gemini: Multi-Chamber Stripper

The Gemini is the most compact, inexpensive and versatile system, which can handle 100-300mm wafers. This multi-chamber, high throughput stripping system is designed specifically for the demands of today's production fabs. By employing ICP, microwave...

Trion Technology
Titan: Loadlocked RIE or PECVD with Vacuum Cassette Elevator

A very compact, fully automated, vacuum loadlocked plasma system for semi-conductor production. Available in either Reactive Ion Etch (RIE) configuration, High Density Inductive Coupled Plasma (HDICP) or Plasma Enhanced Chemical Vapor Deposition (PEC...

Trion Technology
Apollo Stripper

The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem. The Apollo is a compact, inexpensive and versatile system, which can handle 100-300mm wafers. By employing either ICP or microwave and RF ...

Trion Technology
Product Overview 2011 - Full range of vacuum technology

Full range of vacuum technologyVacuum pumps, pump systems, components, accessoriesVacuum consultancyStandarized and fully customized vacuum solutions

Oerlikon Leybold Vacuum GmbH
N-Series Valves

The new N-Series poppet valves are an innovative, compact design with an MTBF of 3 million cycles. A bellows-sealed stem and electropolished stainless steel body provides long life even in the most demanding applications. Standard pnuematic actuation...

Nor-Cal Products, Inc.
Match Pro Impedance Matching Networks

Every Match Pro system is engineered with Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control c...

Comdel, Inc
VF Series Multi-Channel Sysnthesizer

Comdel’s VF Series Multi-Channel Synthesizer Modules provide phase adjustable frequency locking to avoid destructive arcing and cross-talk in multiple cathode plasma processing chambers. The VF Series can be designed with up to sixteen channels...

Comdel, Inc
Slit Valve

Vacuum Slit Valves in any configuration, water-cooled, high-cycle, fast-cycle. Custom designs for unique applications. Bodiless designs to fit between chamber flanges. GNB also builds in-line chambers in any size to meet your requirements. Full e...

GNB Corporation
Cylindrical Magnetron Sputtering Cathode

Angstrom Sciences has developed a rotating cylindrical magnetron assembly that is compact, economical, and lightweight. And, by utilizing the patented technology already incorporated into our other magnetrons, we can provide you with excellent deposi...

Angstrom Sciences, Inc.
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