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Plasma Sources

Electronics and Signal Analysis | Plasma Sources

CDX Series Dual Frequency Power Supplies

The CDX dual frequency RF generator comes in a 1200 or 2000 watt design. The high frequency (HF) section of the CDX provides 600 or 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 600 or 100...

Comdel, Inc

CB Series High Frequency Power Supplies

Applications:The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heati...

Comdel, Inc