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Read full testimonial »Zsa-1000 Long Travel Flexure Piezo Z-stage
Dynamic Structures and Materials, LLC >>
Description
DSM’s piezoelectric ZSA-1000 positioning stage features flexure-guided motion over a 1mm vertical travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff design ensures parallelism in the output motion with minimal roll and tilt as well as excellent dynamic responsiveness and position control. An optional through-hole aperture provides optical or tooling access. In semiconductor industry applications, the “CZSA†model of this stage has been implemented in closed loop control using DSM's SA series servo amplifier and a high-resolution capacitive probe for 20nm position stability and very stable velocity profiles. * Flexure-guided for smooth, parallel motion * Stroke: 1mm ± 10% * Stiffness: 0.4 N/micron ± 10% * Unloaded Resonant Frequency: 165 Hz (as shown) ± 5%, (fixed-free) * Dimensions: 105 x 120 x 25 mm * Through-hole dia (optional): 28mm * Load capability: 60 N * Construction Material: Aluminum/Stainless
| Product line: | Positioning and Motion Control |
|---|---|
| Subcategories: | Flexure Slides | Linear Stages | Piezoelectric Actuators | Positioning Slides | Positioning Stages | Positioning Systems | Precision Slides | ServoControl Systems |
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