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Matrix 105 Plasma Asher Descum Semiconductor Equipment

Matrix 105 Plasma Asher Descum Semiconductor Equipment

PlasmaEquipments >>

Description

Matrix 105 Plasma Asher Descum Equipment for 2 to 4 or 4 to 6 inch wafer

Manufacturer: Matrix Integrated Systems
 
Condition: Used (Refurbished and warranty is available). Contact Us for more information.
 
Wafer Size Capacity: 2 to 4 inch or 4 to 6 inch

Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.Matrix 105 provides high throughput in a single wafer system capable of  handling wide variety of substrates, including round, square and ranging from 2¡± up to 6¡±. By maintaining independent closed-loop system controls, the system optimizes vital device parameters.

   1. Single Wafer, Multi-Step Processing
   2. Closed-Loop Temperature Control
   3. Pressure Control

   4. Accurate, closed-loop pressure control with butterfly-style throttle valve and capacitance manometer
   5. RF power: 100 to 500 watts
   6. Timed cycles up to 4 hour each

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