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Testimonials
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Read full testimonial »Matrix 105 Plasma Asher Descum Semiconductor Equipment
PlasmaEquipments >>Description
Matrix 105 Plasma Asher Descum Equipment for 2 to 4 or 4 to 6 inch wafer
Manufacturer: Matrix Integrated Systems
Condition: Used (Refurbished and warranty is available). Contact Us for more information.
Wafer Size Capacity: 2 to 4 inch or 4 to 6 inch
Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.Matrix 105 provides high throughput in a single wafer system capable of handling wide variety of substrates, including round, square and ranging from 2¡± up to 6¡±. By maintaining independent closed-loop system controls, the system optimizes vital device parameters.
2. Closed-Loop Temperature Control
3. Pressure Control
4. Accurate, closed-loop pressure control with butterfly-style throttle valve and capacitance manometer
5. RF power: 100 to 500 watts
6. Timed cycles up to 4 hour each
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